Energy Based Design And Validation of Latch MEMS g-Switch

Abstract

This paper presents the design and validation of latch MEMS g-switches based on energy calculations. Modelling of a MEMS g-switch that senses a threshold acceleration is carried and compared against experimental results performed on fabricated devices. The device is modelled as a single-degree-of-freedom system with a spring, mass, damper and a non-linear sliding contact for latching. On applying an input acceleration greater than the threshold value, the device latches closing the circuit, and thus we know that the threshold acceleration is reached. The input energy to the system is characterized from the acceleration-time profile and the energy associated with each component, viz., the spring, mass, damper and the sliding friction is calculated from experiments and energy balance is done on the system. Thus the calculated energies, geometric parameters of the switch designed using energy balance are verified.