H. Bauer, B. Arnold, K. Bartsch, R. Rennekamp, A. Leonhardt
{"title":"Manufacturing and structure investigation of TiN-Al2O3-multilayers","authors":"H. Bauer, B. Arnold, K. Bartsch, R. Rennekamp, A. Leonhardt","doi":"10.1016/S0965-9773(99)00400-6","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18878,"journal":{"name":"Nanostructured Materials","volume":"55 1","pages":"1101-1109"},"PeriodicalIF":0.0000,"publicationDate":"1999-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanostructured Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S0965-9773(99)00400-6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}