A 50K devices/sec Real-Time RTN Analysis System for Technology Benchmarking

Abstract

Random Telegraph Noise (RTN) is a type of electronic noise that occurs in semiconductors and ultra-thin gate oxide films. RTN data acquisition and analysis require multiple measurements of millions of devices which is time consuming. This paper presents the design of a real-time RTN analysis system which achieved 17x speed boost with same accuracy by real-time processing noise data through DDR3 memory access. The designed system reduces the per wafer RTN analysis time from 5.5 hours to 0.33 hour.