LI Yicun, Xiaobin Hao, Dai Bing, Dongyue Wen, Zhu Jiaqi, Fangjuan Geng, Weiping Yue, Weiqun Lin
{"title":"Optimization Design of MPCVD Single Crystal Diamond Growth Based on Plasma Diagnostics","authors":"LI Yicun, Xiaobin Hao, Dai Bing, Dongyue Wen, Zhu Jiaqi, Fangjuan Geng, Weiping Yue, Weiqun Lin","doi":"10.15541/jim20230164","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16253,"journal":{"name":"无机材料学报","volume":"46 1","pages":""},"PeriodicalIF":1.7000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"无机材料学报","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.15541/jim20230164","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}
引用次数: 0