An Application of Adaptive Genetic Algorithm Combining Monte Carlo Method

Abstract

Over the past decades, semiconductor manufacturing has been drawing more and more attention. The procedures it involves could be considered as one of the most complicated processes in manufacturing. Owing to this, cases caused by abnormal machines happened from time to time. It requires a large amount of time and experience to solve this problem manually. Meanwhile, state of machines changes as time goes by. As a result, engineers are expected to find out root causes as soon as possible. In this paper, adaptive genetic algorithm is introduced to identify common bad tools and provide suggestions for case study.