Woodpile photonic crystal nanocavity by two-directional etching without wafer bonding

Abstract

Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.