Flexible Piezoresistive Sensors Fabricated by Spalling Technique

Abstract

In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.