On melting thresholds of the film-substrate system under irradiation with a low-energy high-current electron beam

A. Markov, A. Solovyov
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Abstract

The effect of film material thermal conductivity on the melting threshold of the film-substrate system depending on the film thickness during a low-energy high-current electron beam (LEHCEB) irradiation was analyzed based on the numerical solution of the one-dimensional unsteady heat equation with a volumetric thermal source. Experimentally obtained oscillograms of the beam current at the collector and the accelerating voltage were used to simulate the heating source. Numerical variations of the film thermal conductivity were carried out within a wide range, overlapping the entire range for real materials. The dependence of the melting threshold of a homogeneous material on thermal conductivity was determined. The general regularities of the behavior of film and substrate melting thresholds depending on the film thickness were also established.
低能大电流电子束辐照下薄膜-衬底体系的熔化阈值
基于体积热源一维非定常热方程的数值解,分析了低能大电流电子束辐照过程中薄膜材料导热系数对薄膜-衬底体系熔化阈值随薄膜厚度的影响。用实验得到的集电极处束流和加速电压的波形图来模拟加热源。薄膜导热系数的数值变化在很宽的范围内进行,与实际材料的整个范围重叠。确定了均匀材料的熔化阈值与导热系数的关系。建立了薄膜行为和基体熔化阈值随薄膜厚度变化的一般规律。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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