1m/sup 2/ order single-layer slotted waveguide arrays for plasma excitation

Abstract

A single-layer slotted waveguide array is proposed for 1m/sup 2/ plasma excitation at a microwave frequency (2.45 GHz). The electromagnetic field distribution over the aperture is measured with and without the quartz window attached. More accurate slot design will be conducted with the vacuum window, plasma chamber as well as the plasma taken into account.