Microstructure and Tribological Properties of CrN Films Deposited by Direct Current Magnetron Sputtering

IF 0.6 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

稀有金属材料与工程 Pub Date : 2018-08-01 DOI:10.1016/S1875-5372(18)30180-2

Ren Xingrun , Zhang Qinying , Huang Zhu , Su Wei , Yang Jiangao , Chen Hao

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引用次数: 8

Abstract

CrN films were deposited on 304 stainless steel by DC reactive magnetron sputtering. The effects of nitrogen flow on the microstructure, mechanical and tribological properties were characterized by X-ray diffraction, scanning electron microscopy, atom force microscope, microhardness, wear tester and Nanomap 500LS profile. The results show that with the increase of nitrogen flow, the CrN films exhibit a preferential orientation in the (200) direction. The deposition rate of CrN films decreases with the increase of nitrogen flow. Besides, the surface roughness decreases first and then increases with further increase of nitrogen flow. As nitrogen flow increases from 15 cm³/min to 30 cm³/min, microhardness HV is improved from 5273 MPa to 10422 MPa, and then decreases to 9180 MPa when the nitrogen flow further increases to 35 cm³/min. Wear test results show that the CrN films deposited at nitrogen flow of 30 cm³/min achieve minimum friction coefficient value of 0.93 and wear rate 2.02×10⁻¹⁵ m³·(N·m)⁻¹, which present best wear resistance performance.

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直流磁控溅射沉积CrN薄膜的微观结构和摩擦学性能

采用直流反应磁控溅射技术在304不锈钢表面沉积了CrN薄膜。采用x射线衍射、扫描电镜、原子力显微镜、显微硬度、磨损试验机和Nanomap 500LS型仪表征了氮气流动对合金微观结构、力学性能和摩擦学性能的影响。结果表明:随着氮流量的增加，CrN膜在(200)方向上表现出优先取向;CrN膜的沉积速率随氮流量的增加而降低。随着氮流量的增加，表面粗糙度先减小后增大。当氮气流量从15 cm3/min增加到30 cm3/min时，显微硬度HV从5273 MPa提高到10422 MPa，当氮气流量进一步增加到35 cm3/min时，硬度HV降低到9180 MPa。磨损试验结果表明，在氮气流量为30 cm3/min时沉积的CrN膜的摩擦系数最小为0.93，磨损率2.02×10−15 m3·(N·m)−1，具有最佳的耐磨性能。

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