Writing Nanostructures with a Helium Beam

S. Nowak, T. Pfau, J. Mlynck
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Abstract

It is of considerable ttduiologicid iiitrrcst how new proccsscs for nanofabrication can be sed to go Ixyond resolution limits 01 optical litliugraphy. The rcquireincnts for such new tcdinologies arc high resolution, paralld writing m d thc possibility to form aperiodic structures. 111 our apliroadi to atom lithography we USE a rcsist tediiiique to burn pattcriis into a litliograpliic sample, where we make use ai the large internal energy (20 eV) of metastable hcliuin. For this trduiiqiie a tliin (1.5 nzn) self-assembliiig nionolaycr (SAM) of dodccmcthiolate molecules is de ositcd on a gold saniplc, wliidi is then stmcturccl by Augcr-drexcitation of He*-ntoms that hit the layer! This spatially damaged layer s e r w as a rcsist for a wet-dimnical etching process (sce fig.l(a)-(d)). In a first experinleiit we were able to copy a mask into lhc gold layer (SCT figure) and adiicved an edge resolution of less than 80 nni (see fig.l(c)!(f)). The nec~ssary dose for exposure corrcspondcd to one He'-atom per SAM-inoleciile, whidi means in our setup an rxposiirc tiinc of 8 niinutcs. In the next cxpcrinicnt.al step wc r i l l realize a pinhole camera for metastable helium whidi will allow us to produce structure^ in thc order of 30-50 inn by dernagnification of "mcsoscopic" (total sire 200 pm, fcature s i x 10 p i ) objects by a factor of 50-100. The scheme of a pinhole camera hears sevcral advantagcs besides its simple setup, as there me: the absence of any chromatic aberrations and the possibility to form pictura of npcriodic objects.
用氦束书写纳米结构
如何利用纳米加工的新工艺来突破光学光刻的分辨率限制,是一个相当重要的研究课题。对这些新技术的要求是高分辨率,平行书写和形成非周期结构的可能性。我们在原子光刻上的应用,我们利用亚稳氦的巨大内能(20ev),使用一种化学技术将原子光刻烧成一个微光刻样品。为了实现这一技术,将一层(1.5 nzn)的甲基硫酸盐分子自组装的离子层(SAM)放置在金离子层上,然后通过对击中该层的He*-原子的augr -激发来构建离子层。该空间损伤层被用作湿法蚀刻工艺的介质(见图1 (a)-(d))。在第一次实验中,我们能够将掩模复制到lhc金层中(SCT图),并获得了小于80 nni的边缘分辨率(见图1 (c)!(f))。暴露的最小剂量相当于每个sam -分子一个He -原子,而在我们的设置中意味着8分钟的暴露时间。在接下来的实验中。在接下来的步骤中,我将实现一个用于亚稳氦的针孔相机,这将使我们能够通过将“微观”(总分辨率为200pm,特征为1px × 10px)物体放大50-100倍来产生30-50阶的THC结构^。针孔相机的方案除了设置简单外,还有几个优点,如我所见:没有任何色差,可以形成非周期性物体的图像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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