Fabrication of optical flat mirror with nanometer surface error

Abstract

In order to polish optical flat mirror with nanometer surface error efficiently,a consisting of new polishing technology traditional continuous polishing( CP) and advanced ion beam figuring( IBF) is presented in this paper. The polishing principles of CP and IBF are introduced. The polishing experiment and material removal function of IBF are studied. A Ф150 mm optical flat mirror is polished by the combined polishing technology. After polishing,the surface error and roughness of the flat mirror are 1. 217 nm RMS and0. 506 nm RMS,respectively. The experiment results indicate that the combined polishing technology is effective for polishing optical flat mirror with nanometer surface error.