A high performance CMOS compatible thermopile based on noise added mechanism

Proceedings of IEEE Sensors, 2004. Pub Date : 2004-01-01 DOI:10.1109/ICSENS.2004.1426240

Chih-Hsiung Shen, Bo Wang

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引用次数: 5

Abstract

Recently, a novel signal processing theory related to noise has grown and been proven. A new high performance thermopile based on the noise added scheme has been realized by an embedded heater for a CMOS compatible thermoelectric infrared sensor. Certain complex systems can improve performance with added optimal noise that classical theory cannot explain. To that end, we are using noise in a remote temperature sensing system to enhance its function without altering the system. Thermopile sensors are designed and fabricated using 1.2 /spl mu/m CMOS IC technology combined with a subsequent anisotropic front-side etching. We first develop an active thermopile with an embedded heater which is easily and naturally driven by a noise generation circuit. The stochastic resonance theory can be realized as a reduction in the temperature detection threshold. We have greatly improved the performance of the remote temperature sensing system in the presence of noise. Stochastic resonance can reduce threshold detection resolution and greatly improve the temperature detection limit with a low cost scheme without using a higher resolution ADC.

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一种基于噪声附加机制的高性能CMOS兼容热电堆

近年来，一种新的与噪声相关的信号处理理论得到了发展和验证。利用嵌入式加热器为CMOS兼容热电红外传感器实现了一种新型的基于加噪方案的高性能热电堆。某些复杂系统可以通过添加经典理论无法解释的最佳噪声来提高性能。为此，我们在不改变系统的情况下，在远程温度传感系统中使用噪声来增强其功能。热电堆传感器的设计和制造采用1.2 /spl μ m CMOS集成电路技术，并结合随后的各向异性正面蚀刻。我们首先开发了一种带有嵌入式加热器的有源热电堆，该热电堆易于自然地由噪声产生电路驱动。随机共振理论可以通过降低温度检测阈值来实现。我们极大地改善了存在噪声的远程温度传感系统的性能。随机共振可以在不使用高分辨率ADC的情况下以低成本方案降低阈值检测分辨率并大大提高温度检测极限。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings of IEEE Sensors, 2004.

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