Ultraviolet-sensitive AlGaN-based surface acoustic wave devices

Abstract

Two types of novel ultraviolet-sensitive III-nitride based surface acoustic wave devices are presented. We demonstrate the Al/sub x/Ga/sub l-x/N-based surface acoustic wave delay-line oscillator, which is applied as an ultraviolet sensor capable of solar-blind operation with remote wireless pickup of the output signal. Also, we report on the SAW-induced high-frequency resistance modulation effect, which is dramatically increased under ultraviolet illumination.