A High-resolution Thermoreflectance Imaging Technique based on Visible light

Abstract

Firstly, we describe the principle and the details of our home-built visible light-based thermoreflectance imaging setup. Based on the prototype, a transient temperature measurement of a micro resistance in operation were undertaken. With this technique, a high-resolution thermal distribution of devices can be achieved in real time. The factors influencing spatial resolution, time resolution and temperature resolution of the temperature measurement were analyzed and discussed further. The analysis and results showed that the prototype, which based on a visible light-based thermoreflectance imaging technique, could achieve a spatial resolution of 663nm, a time resolution of 2μs, and a temperature resolution of 0.1K.