V. Pawar, P. Menon, A. L. Murty, P. Pal, A. K. Pandey
{"title":"Influence of scalloping on electrostatic forces in comb drive microdevices","authors":"V. Pawar, P. Menon, A. L. Murty, P. Pal, A. K. Pandey","doi":"10.1007/s41683-019-00042-0","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":91892,"journal":{"name":"ISSS journal of micro and smart systems","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2019-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISSS journal of micro and smart systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s41683-019-00042-0","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}