M.S. Nieuwenhuizen, A.J. Nederlof, M.J. Vellekoop, A. Venema
{"title":"Preliminary results with a silicon-based surface acoustic wave chemical sensor for NO2","authors":"M.S. Nieuwenhuizen, A.J. Nederlof, M.J. Vellekoop, A. Venema","doi":"10.1016/0250-6874(89)87087-8","DOIUrl":null,"url":null,"abstract":"<div><p>A surface acoustic wave chemical sensor consisting of two identical ZnOSiO<sub>2</sub>Si layered delay lines has been realized on silicon. Together with a dual automatic gain-controlled amplifier, a dual delay-line oscillator system is formed.</p><p>Preliminary results of the system when used as a sensor for NO<sub>2</sub> are presented. One of the delay lines is covered with copper phthalocyanine as the chemical interface, grown by a physical vapour deposition technique.</p><p>The experimental performance has been compared with previous results obtained with a surface acoustic wave chemical sensor system based on quartz. Parameters such as sensitivity, selectivity, drift, response time and noise have been examined.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"19 4","pages":"Pages 385-392"},"PeriodicalIF":0.0000,"publicationDate":"1989-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87087-8","citationCount":"59","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870878","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 59
Abstract
A surface acoustic wave chemical sensor consisting of two identical ZnOSiO2Si layered delay lines has been realized on silicon. Together with a dual automatic gain-controlled amplifier, a dual delay-line oscillator system is formed.
Preliminary results of the system when used as a sensor for NO2 are presented. One of the delay lines is covered with copper phthalocyanine as the chemical interface, grown by a physical vapour deposition technique.
The experimental performance has been compared with previous results obtained with a surface acoustic wave chemical sensor system based on quartz. Parameters such as sensitivity, selectivity, drift, response time and noise have been examined.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
