A Novel Calibration-Free Fully Integrated CMOS Capacitive Sensor for Life Science Applications

H. Tabrizi, Saghi Forouhi, Omid Farhanieh, S. Magierowski, E. Ghafar-Zadeh
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引用次数: 1

Abstract

CMOS capacitive sensors for label-free monitoring of biological/chemical reactions are typically prone to inaccuracies due to the parasitic elements and mismatch rooted in the CMOS fabrication process as well as real-time changes inside the sample solution. The former can usually be compensated by employing differential circuits and static calibration of the sensor before the experiment. On the other hand, changes in the sample solution such as sedimentation of non-target molecules or change in the conductivity of solution can significantly alter the operating point and result in inaccurate sensor readings that might require recalibration of the sensor during the experiment. In this paper, we present a CMOS capacitive sensor that is calibration-free via the creation of time-resolved three-dimensional (3D) surface electrochemical profiles. These 3D profiles uncover the variations of both target and unwanted parasitic capacitances. The sensor includes on-chip interdigitated electrodes (IDEs), a wide input dynamic range (IDR) differential capacitance-to-current converter, a digitally programable reference capacitor, and an oscillator-based analog-to-digital converter (ADC), and is implemented using 0.35 µm AMS CMOS process. The IDR covers a change in capacitance as small as 1 fF up to 1.27 pF with a minimum detectable change of 0.416 fF.
一种用于生命科学的新型免校准全集成CMOS电容式传感器
用于生物/化学反应无标签监测的CMOS电容式传感器通常容易由于寄生元件和CMOS制造过程中的不匹配以及样品溶液内部的实时变化而产生不准确性。前者通常可以通过采用差分电路和在实验前对传感器进行静态校准来补偿。另一方面,样品溶液的变化,如非目标分子的沉降或溶液电导率的变化,会显著改变工作点,导致传感器读数不准确,这可能需要在实验过程中重新校准传感器。在本文中,我们提出了一种CMOS电容式传感器,该传感器通过创建时间分辨三维(3D)表面电化学剖面而无需校准。这些三维轮廓揭示了目标和不需要的寄生电容的变化。该传感器包括片上交叉数字电极(ide)、宽输入动态范围(IDR)差分电容-电流转换器、数字可编程参考电容器和基于振荡器的模数转换器(ADC),采用0.35µm AMS CMOS工艺实现。IDR涵盖了小至1ff到1.27 pF的电容变化,最小可检测变化为0.416 fF。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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