Using an optimized grating as a mid-IR surface plasmon gas sensor utilizing highly doped silicon

Abstract

Grating structures with 1D and 2D periodicity and different symmetry are investigated to excite an SPP mode based on doped silicon. It was found that total absorptance can be achieved by an optimized grating with hexagonal symmetry and circle unit cell under normal incidence for a doping concentration of 1×1021cm-3.