Study of the Properties of a Plain Cathode Grimm-Type Dc Glow Discharge Source Operated in a Current-controlled Pulse Regime

O. Bánhidi
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Abstract

Glow discharge sources have been used for analytical purpose for several years. Recently the pulsed operation mode has gained an increasing importance. Operating the source in current-controlled mode instead of the traditional voltage-feed method may have the advantage of precise control of the source’s state and it provides a convenient way to study the relationship among the emitted line intensity and the key parameters of the plasma such as the pressure of the filling gas, the voltage-drop on the source as well as the current flowing through the device. In the following the brief description of the system, the relationship among the voltage drop on the source, the pressure of the filling gas (Ar), the current of the DC pulses as well as the line intensities are presented and discussed.
电流控制脉冲状态下普通阴极grmm型直流辉光放电源的特性研究
辉光放电源已经用于分析目的好几年了。近年来,脉冲操作方式越来越受到人们的重视。用电流控制的方式来操作源,而不是传统的电压馈送方式,不仅可以精确控制源的状态,而且为研究发射线强度与等离子体的关键参数(如充注气体的压力、源上的压降以及流过器件的电流)之间的关系提供了方便的方法。在下面对系统的简要描述中,给出并讨论了源电压降、充注气体压力(Ar)、直流脉冲电流以及线路强度之间的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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