Nonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive

Abstract

In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated. Results are verified by the investigation vehicle, a fabricated MEMS scanning mirror. The experimental and simulation results have a great agreement on showing the similar parametric response and stiffness softening. Unstable region is also observed and well validated by the model.