Modeling the Electromechanical Response of RF-MEMS Switches

D. Elata
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引用次数: 3

Abstract

In this work systematic approaches for extracting parameters of the static and dynamic response of electrostatic switches are presented. A novel strategy enables accurate and efficient extraction of the static pull-in state of voltage and charge driven actuators. Another strategy enables to extract parameters of the dynamic pull-in while only considering static states of the system
RF-MEMS开关机电响应建模
本文提出了系统地提取静电开关静态和动态响应参数的方法。一种新颖的策略能够准确有效地提取电压和电荷驱动执行器的静态拉合状态。另一种策略可以在只考虑系统静态状态的情况下提取动态拉入的参数
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