{"title":"Micromechanical piezoelectric-on-silicon BAW resonators for sensing in liquid environments","authors":"A. Prasad, A. Seshia, J. Charmet","doi":"10.1109/FCS.2015.7138825","DOIUrl":null,"url":null,"abstract":"This paper reports micromachined piezoelectric-on-silicon bulk acoustic wave resonators operating at a nominal frequency of approximately 3.15 MHz in fluidic media. Electrical measurements of the open-loop response of the resonators when one of the resonator surfaces is submerged in water indicate high quality factors in the range of 110-190. These values of quality factor are at least an order of magnitude higher than the flexural mode counterparts. The resonators are further exposed to Glycerol-Water mixtures of varying viscosity-density resulting in characteristic negative resonant frequency shifts. Experimental values are compared with a simplified liquid loading model and an agreement of up to 13% for highest and within 3-4% for lowest glycerol concentrations is established. These devices due to the relative ease of operation in liquid environments, scalability, high quality-factors and high mass-sensitivity have the potential for integration with microfluidics and electronics in order to realize an integrated platform for biochemical sensing and analysis.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"时间频率公报","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.1109/FCS.2015.7138825","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
This paper reports micromachined piezoelectric-on-silicon bulk acoustic wave resonators operating at a nominal frequency of approximately 3.15 MHz in fluidic media. Electrical measurements of the open-loop response of the resonators when one of the resonator surfaces is submerged in water indicate high quality factors in the range of 110-190. These values of quality factor are at least an order of magnitude higher than the flexural mode counterparts. The resonators are further exposed to Glycerol-Water mixtures of varying viscosity-density resulting in characteristic negative resonant frequency shifts. Experimental values are compared with a simplified liquid loading model and an agreement of up to 13% for highest and within 3-4% for lowest glycerol concentrations is established. These devices due to the relative ease of operation in liquid environments, scalability, high quality-factors and high mass-sensitivity have the potential for integration with microfluidics and electronics in order to realize an integrated platform for biochemical sensing and analysis.