W. Eschen, L. Loetgering, V. Schuster, R. Klas, J. Limpert, J. Rothhardt
{"title":"Table-top high-resolution ptychographic EUV imaging","authors":"W. Eschen, L. Loetgering, V. Schuster, R. Klas, J. Limpert, J. Rothhardt","doi":"10.1364/isa.2021.if2h.3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":19628,"journal":{"name":"OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP)","volume":"60 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/isa.2021.if2h.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}