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Time reversal plasmas as a versatile space-time patterning deposition method

2021 IEEE 16th Nanotechnology Materials and Devices Conference (NMDC) Pub Date : 2021-12-12 DOI:10.1109/nmdc50713.2021.9677515
V. Mazières, R. Pascaud, L. Liard, S. Dap, R. Clergereaux, O. Pascal
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时间反转等离子体作为一种多用途的时空图形沉积方法
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2021 IEEE 16th Nanotechnology Materials and Devices Conference (NMDC)
2021 IEEE 16th Nanotechnology Materials and Devices Conference (NMDC)
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