{"title":"A wafer surface defect detection method built on generic object detection network","authors":"Xinyu Wang, Xiaoli Jia, Chuyi Jiang, Sanxin Jiang","doi":"10.2139/ssrn.4027241","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11342,"journal":{"name":"Digit. Signal Process.","volume":"21 1","pages":"103718"},"PeriodicalIF":0.0000,"publicationDate":"2022-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digit. Signal Process.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2139/ssrn.4027241","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
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