Stress sensitivity coefficients of HBAR

Abstract

Vibration sensitivity is an important specification for oscillators dedicated to space or airborne systems. Vibration sensitivity can be due to the resonator, the oscillator loop or non-oscillator components like wire, for instance. Commonly, the main source of acceleration sensitivity is due to the resonator. Active compensation can be used to decrease this effect, but such systems are not easily miniaturized. This paper presents computations of the stress sensitivity coefficients of frequency for the high-overtone bulk acoustic resonators and the design of a simple packaging to minimize vibration sensitivity. The final goal is to control vibration sensitivity of the high-overtone bulk acoustic resonators with dedicated packaging. The computed results are compared to experimental ones. The agreement between theoretical and experimental results is about 50%.