D. Boivin, A. Najah, R. Jean-Marie-Désirée, C. Noël, G. Henrion, S. Cuynet, L. De Poucques
{"title":"Towards control of TiO2 thickness film in R-HiPIMS process with a coupled optical and electrical monitoring of plasma","authors":"D. Boivin, A. Najah, R. Jean-Marie-Désirée, C. Noël, G. Henrion, S. Cuynet, L. De Poucques","doi":"10.1016/j.surfcoat.2021.128073","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":22031,"journal":{"name":"Surface and Coatings Technology","volume":"6 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface and Coatings Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/j.surfcoat.2021.128073","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}