Recent progress of amorphous silicon technology and its application to optoelectronic devices

Abstract

A review is given on recent progress in tetrahedrally-bonded amorphous semiconductors and their technological applications to optoelectronic devices. First, some significant advantages of these materials are pointed out, and tangible instances are demonstrated from current technological topics. The present state of the art in optoelectronic device development with this new kind of thin film is then reviewed, and the technical data are summarized and discussed.