Deposition and Characterization of ZnS Thin Films Using Chemical Bath Deposition Method in the Presence of Sodium Tartrate as Complexing Agent

A. Kassim, T. Tee, H. Min, S. Nagalingam
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引用次数: 6

Abstract

ZnS thin films were deposited on indium tin oxide glass substrate using the chemical bath deposition method. The deposited films were characterized by X-ray diffraction and atomic force microscopy. The influence of bath temperature on the structure and morphology of the thin films was investigated at three different bath temperatures of 60, 70 and 80 °C in the presence of sodium tartrate as a complexing agent. The XRD results indicated that the deposited ZnS thin films exhibited a polycrystalline cubic structure. The number of ZnS peaks increased from three to four peaks as the bath temperature was increased from 60 to 80 °C based on the XRD patterns. From the AFM measurements, the film thickness and surface roughness were found to be dependent on the bath temperature. The grain size increased as the bath temperature was increased from 60 to 80 °C.
酒石酸钠络合下化学浴沉积ZnS薄膜及其表征
采用化学浴沉积法在氧化铟锡玻璃衬底上沉积了ZnS薄膜。用x射线衍射和原子力显微镜对沉积膜进行了表征。以酒石酸钠为络合剂,在60、70和80℃三种不同的浴温下,研究了浴温对薄膜结构和形貌的影响。XRD结果表明,沉积的ZnS薄膜呈多晶立方结构。XRD图谱显示,随着温度从60℃升高到80℃,ZnS的峰数从3个增加到4个。从原子力显微镜的测量,发现薄膜厚度和表面粗糙度依赖于浴温度。随着温度从60℃升高到80℃,晶粒尺寸逐渐增大。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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