Design, Implementation, and Evaluation of High-Efficiency High-Power Radio-Frequency Inductors

Roderick S. Bayliss, Rachel S. Yang, Alex J. Hanson, C. Sullivan, D. Perreault
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引用次数: 4

Abstract

Radio-Frequency (RF) power inductors are critical to many applications such as communications, RF heating, and plasma generation for semiconductor processing. Their high loss and large size can often be major contributors to the overall system size and loss. Inductors for high frequency and high power (e.g., tens of MHz and hundreds of watts and above) have traditionally been implemented as air-core solenoids to avoid high-frequency core loss. These designs have more turns than magnetic-core inductors and thus high copper loss. We propose a magnetic-core inductor design approach that leverages NiZn ferrites with low loss at RF, distributed gaps and field balancing to achieve improved performance at tens of MHz and at hundreds of watts and above. We demonstrate this approach with a 13.56 MHz, 500 nH, 80 Apk magnetic-core inductor design for a plasma generation matching network that achieves a quality factor of >1800 in simulation and >1100 experimentally. Additionally, we describe the difficulties in experimentally measuring inductor quality factors with very high current and very low loss at high frequency.
高效率、高功率射频电感器的设计、实现与评估
射频(RF)功率电感对许多应用至关重要,如通信、射频加热和半导体加工的等离子体产生。它们的高损耗和大尺寸通常是整个系统的大小和损耗的主要贡献者。用于高频和高功率(例如,数十兆赫和数百瓦及以上)的电感器传统上采用空芯螺线管来实现,以避免高频磁芯损耗。这些设计比磁芯电感有更多的匝数,因此铜损耗高。我们提出了一种磁芯电感设计方法,该方法利用具有RF低损耗、分布间隙和场平衡的NiZn铁氧体,在数十MHz和数百瓦及以上的情况下实现改进的性能。我们用13.56 MHz, 500 nH, 80 Apk的磁芯电感器设计了一个等离子体生成匹配网络,该网络的仿真质量因子>1800,实验质量因子>1100。此外,我们还描述了在高频情况下,用非常大的电流和非常低的损耗来实验测量电感质量因数的困难。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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