A 2×2 Flexible Tactile Sensor Array Based on Mechanical-Field-Coupled TFTs

Abstract

A flexible tactile sensor consisting of an array of mechanical-field-coupled thin-film transistors (MFCTFTs) is presented. By laminating a PVDF film with an array of dual-gate TFTs, the flexible tactile sensor array is formed. To improve the sensitivity, a 3-D channel structure is implemented in the TFT. The force-induced deformation can be mapped in the 2×2 pixelated array, making it promising for electronic skin applications in robotics.