Boron and boron carbide by vapor deposition

J.G. Donaldson, J.B. Stephenson, A.A. Cochran
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引用次数: 8

Abstract

Boron trichloride can be reduced by hydrogen at 1,300°C with a recovery of approximately 85% as elemental boron. The optimum H2 to BCl3 molar ratio was 30 under the test conditions used. No reaction between tungsten substrates and the boron deposits could be detected. Other substrate materials tested, in order of increasing reactivity with the depositing boron, were fused silica, mullite, graphite, titanium and nickel. Alumina reacted extensively with the chloride gases to form aluminum chloride.

BBr3 can be reduced by hydrogen at slightly lower temperatures than can BCl3, but this advantage is probably outweighed by the lower boron content, lower volatility and higher cost of BBr3.

When stoichiometric amounts of BCl3 and CH4 were reacted with an excess of H2 at 1,300°C, B4C deposits were obtained. An excess of CH4 in the reaction mixture resulted in the codeposition of B4C and free carbon. B4C deposits contained 74.7 to 76.0% boron, compared with 78.3% for pure B4C. The specific gravity of the B4C was 2.32, which is 90% or more of the theoretical value. The Knoop microhardness of one B4C deposit on a mullite substrate was 3,472.

A method of etching B4C was developed and used. Etching revealed that the B4C deposits had a columnar microstructure with the columns perpendicular to the substrate.

When BCl3 was reduced with H2 at 1,500°C with a graphite substrate, the depositing boron reacted with the graphite to produce uniform, strongly adherent coatings of B4C on graphite. The Knoop microhardness of two of these B4C coatings was 3,065 and 3,195, which corresponds to a Mohs hardness of approximately 9. Graphite coated with B4C has many physical and chemical properties that would be desirable in rocket nozzle applications.

气相沉积硼和碳化硼
三氯化硼在1300℃时可被氢还原,其单质硼的回收率约为85%。在实验条件下,H2与BCl3的最佳摩尔比为30。未检测到钨衬底与硼沉积之间的反应。其他被测试的衬底材料,按照增加与沉积硼的反应性依次是熔融二氧化硅、莫来石、石墨、钛和镍。氧化铝与氯化物气体广泛反应生成氯化铝。BBr3可以在比BCl3稍低的温度下被氢还原,但这一优势可能被BBr3的低硼含量、低挥发性和高成本所抵消。当化学计量量的BCl3和CH4与过量的H2在1300℃下反应时,得到B4C沉积。反应混合物中过量的CH4导致B4C和游离碳的共沉积。硼含量为74.7 ~ 76.0%,纯硼含量为78.3%。B4C的比重为2.32,是理论值的90%以上。莫来石基体上B4C镀层的Knoop显微硬度为3472。提出并应用了一种蚀刻B4C的方法。蚀刻表明,B4C沉积层具有柱状结构,柱状结构垂直于衬底。当BCl3在1500℃的温度下与H2在石墨基体上还原时,沉积的硼与石墨发生反应,在石墨表面生成均匀、强附着力的B4C涂层。这两种B4C涂层的努氏显微硬度分别为3065和3195,对应于莫氏硬度约为9。涂有B4C的石墨具有许多在火箭喷嘴应用中所需要的物理和化学特性。
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