High Density Arrays of Carbon Nanomembrane Ultrasonic MEMS

Abstract

Ultrathin carbon membranes are proposed for implementation as vibrating part for ultrasonic transducers. The mechanical properties of these membranes allow a significant operation in forced oscillations mode. Unlike resonant systems, the frequency range of operation is very wide, and the design of the transducers more flexible. Dense arrays of small size transducers are suitable to phased array techniques. The first test devices were manufactured and characterized; the feasibility of emitting and receiving acoustic waves with such devices has been demonstrated.