INTELLIGENT EXPLOSION-PROOF GAS MONITORING AND EARLY WARNING SYSTEM WITH SEMICONDUCTOR PLANT As DISASTER PRVENTION TARGET

Abstract

The semiconductor factory itself has a large amount of flammable and explosive gases, chemicals, etc., which have great harm to the safety of production equipment and personal safety. When the abnormal system fails, it may lead to inevitable gas leakage risks. In the past, many fire and explosion accidents and toxic gases happened in Taiwan. The leakage has seriously affected the operation of Taiwan's semiconductor supply chain. Especially now that Taiwan has become the world's leading semiconductor manufacturing center, it is particularly important. Therefore, the importance of monitoring and early warning of flammable and explosive dangerous gases is extremely important. Now that the era of Industry 4.0 has arrived, the intelligent production of semiconductor companies is undoubtedly an inevitable trend. Only by realizing the intelligence of explosion-proof gas monitoring and early warning can meet and adapt to the production needs of the era of Industry 4.0. ESP32 is a family of low-cost, low-power single-chip microcontrollers that integrate Wi-Fi and dual-mode Bluetooth. It uses the Tensilica Xtensa LX6 microprocessor and includes dual-core and single-core variants with built-in antenna switches, RF converters, power amplifiers, low noise receiver amplifiers, f2ilters and power management modules. This research takes ESP3 as the core, and the system is designed according to the scene of the semiconductor factory. This intelligent explosion-proof gas monitoring and early warning system includes: sensing and detection system; data communication system; data processing system; comprehensive systems such as early warning, semiconductor factory engineers can real-time monitoring of dangerous gases, according to the intuitive results such as data and status generated by the system, and the trend of gas status changes can be obtained by analyzing the data and status information stored in the database, and the potential threats of safety hazards can be stifled in the cradle as soon as possible. So as to ensure the safety, continuity, and efficiency of the real-time wafer production process.