Structure and Properties of Periodic Multilayer Metal/nitride Coatings Deposited from Filtered Vacuum-arc Plasma Using Ti-Al-Y Cathode

V. Vasyliev, A. Luchaninov, E. Reshetnyak, V. Strel’nitskij
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Abstract

The composition, structure, hardness and wear resistance of periodic multilayer metal/nitride coatings deposited from a filtered vacuum-arc plasma using $\mathrm{T}\mathrm{i}_{0.47}\mathrm{A}1_{0.51}\mathrm{Y}_{0.02}$ cathode by the PIII& D method were investigated. The coating period was changed in the range of 35-300 nm by changing the duration of the periodic feeding (pumping) of nitrogen into the vacuum chamber. The mechanical characteristics of multilayer metal / nitride and single-layer nitride coatings are compared. Single-layer nitride coatings are characterized by a fairly high hardness of 34-36 GPa. The hardness of the multilayer coatings is lower and decreases from 24 to 19 GPa with decreasing period of the composition. The introduction into the composition of nitride coatings of more plastic metal layers does not increase the criterion H/E, which is in the range of 0.07 to 0.09. Due to the high hardness, single-layer coatings have high resistance to abrasive wear, but are destroyed by cavitation due to cracks and pitting peels. Multilayer coatings were slightly better in the cavitation test due to the less pronounced columnar structure, but do not withstand abrasive effects.
Ti-Al-Y阴极过滤真空弧等离子体沉积多层金属/氮化物周期性涂层的结构与性能
采用pii和D方法研究了过滤真空电弧等离子体在$\ mathm {T}\ mathm {i}_{0.47}\ mathm {a}_{0.51}\ mathm {Y}_{0.02}$阴极上沉积的周期性多层金属/氮化物镀层的组成、组织、硬度和耐磨性。通过改变真空室中氮气的周期,涂层周期在35 ~ 300 nm范围内发生变化。比较了多层金属/氮化物和单层氮化物涂层的力学性能。单层氮化物涂层具有相当高的硬度(34- 36gpa)。多层涂层的硬度较低,随着组分的减少,硬度从24 GPa降低到19 GPa。在含氮化物涂层中加入更多塑性金属层并不会增加判据H/E,其范围在0.07 ~ 0.09之间。由于硬度高,单层涂层具有较高的耐磨料磨损性,但由于裂纹和点蚀剥落而造成空化破坏。由于多层涂层的柱状结构不太明显,因此在空化试验中效果略好,但不能承受磨蚀作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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