The ion-acoustic instability of the inductively coupled plasma driven by the ponderomotive electron current formed in the skin layer

Abstract

The stability theory of the inductively coupled plasma (ICP) is developed for the case when the electron quiver velocity in RF wave is of the order of or is larger than the electron thermal velocity. The theory predicts the existence the instabilities of the ICP which are driven by the current formed in the skin layer by the accelerated electrons, which move relative ions under the action of the ponderomotive force.