Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite

Abstract

We propose a simple fabrication method for a dual-axis polymer MEMS mirror made of negative photoresist SU-8 containing magnetic nanoparticles as a magnetically driven actuator. The proposed mirror is driven by magnetic attractive force using external magnetic field. So, it doesn't need complex wiring patterns and can simply fabricate by photolithography only. For evaluation of drive characteristics of the proposed mirror, we measured static deflection angle and frequency response of the fabricated mirror by using a laser position sensor. As a result, we obtained optical deflection angle ±15deg. and the second resonant frequency 29.2Hz of torsional oscillation.