Preparation of LNBN thin films by RF sputtering and their dielectric properties

H.F. Li, Z. Meng, G. Huang
{"title":"Preparation of LNBN thin films by RF sputtering and their dielectric properties","authors":"H.F. Li, Z. Meng, G. Huang","doi":"10.1109/CEIDP.1989.69574","DOIUrl":null,"url":null,"abstract":"(LaNa)/sub 0.5/Bi/sub 2/Nb/sub 2/O/sub 9/ (LNBN) thin films have been prepared by RF sputtering with substrate temperatures up to 450 degrees C. The structural orientation of the annealed films versus substrate temperature is shown to be complex. The substrate temperature had a profound influence on the dielectric properties of the LNBN thin films. The LNBN thin films display a relaxation phase transition.<<ETX>>","PeriodicalId":10719,"journal":{"name":"Conference on Electrical Insulation and Dielectric Phenomena,","volume":"41 1","pages":"369-374"},"PeriodicalIF":0.0000,"publicationDate":"1989-10-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference on Electrical Insulation and Dielectric Phenomena,","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CEIDP.1989.69574","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

(LaNa)/sub 0.5/Bi/sub 2/Nb/sub 2/O/sub 9/ (LNBN) thin films have been prepared by RF sputtering with substrate temperatures up to 450 degrees C. The structural orientation of the annealed films versus substrate temperature is shown to be complex. The substrate temperature had a profound influence on the dielectric properties of the LNBN thin films. The LNBN thin films display a relaxation phase transition.<>
射频溅射制备LNBN薄膜及其介电性能
在衬底温度高达450℃的条件下,采用射频溅射法制备了(LaNa)/sub 0.5/Bi/sub 2/Nb/sub 2/O/sub 9/ (LNBN)薄膜。衬底温度对LNBN薄膜的介电性能有深远的影响。LNBN薄膜表现为弛豫相变。
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