Advances in Deposition of Main-Group Metal Oxides and Rare-Earth Oxides from Metal Enolates

Abstract

This chapter is an update of a review published by our group elsewhere in Patai's Series; in addition, in this volume, chapters present the recent advances in the deposition of metals and transition-metal oxides, all derived from metal enolates. Materials featuring group 3 - 12 elements have attracted great technological and scientific attention during the last decades because of their outstanding chemical and physical properties. They are widely used in industry, including a variety of catalyst supports, coatings, as dielectrics for semiconducting devices, and as sensors. Keywords: metal enolates; transition-metal oxides; β-diketonates; β-enaminones; β-diketiminates; macrocycles; deposition; gas phase; wet chemistry; group 3 - 12 elements