Influence of roughness of the substrate on the structure and mechanical properties of TiAlN nanocoating condensed by DCMS

Abstract

Results of scientific researches show the trend of active using nitrides and borides of transition metals and their combination in developing protective materials. While single elements nitrides have been well studied, their multilayer modifications and combinations require more detailed study. Physical-mechanical properties and structural-phase state of multilayer nanocoating according to the deposition conditions is an important task for the study. A thin coating of TiAlN was deposited on R6M5 high-speed steel using an curent magnetron sputtering (DCMS) process. The microstructure and mechanical properties of deposited TiAlN films were investigated. It was shown that the morphology of the TiAlN coating mainly depends on the morphology of the substrate surface and the growth parameters of the coating.