DETERMINATION OF PLATES DIELECTRICAL SURFACES CHARAKTERISTICS BY LIGHT SCATLERING

Podoprigora V.G, L. A. Kyrenski
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Abstract

The paper proposes a new method for determining the roughness parameters and the correlation function (CF) of supersmooth dielectric plates. The method is based on finding the expansion coefficients (CF) from the experimental light scattering indicatrix in a series according to a system of orthogonal functions, followed by the calculation of the standard deviations of the surface irregularity heights σ and the correlation period Т. Distinctive features of the method are: 1) the absence of ambiguity that arises when fitting theoretical dependences with different correlation functions, which themselves depend on the roughness parameters, to the experimental scattering curve; 2) the possibility of avoiding the need to measure the scattering indicatrix in the entire hemisphere above the sample. This method for determining the CF and surface roughness parameters can be used for any type of interface, subject to the Rayleigh criterion, which determines the degree of roughness of the reflection surface with respect to the wavelength of the incident radiation. Therefore, the objects of study can be not only surfaces with nanometer roughness irradiated by laser light, but also, for example, earth covers during their remote sensing by radio signals from navigation satellites. For polished quartz plates, the values of the surface parameters were obtained close to similar values measured independently on a laser interference profilometer by other authors.
用光散射法测定板介质表面特性
提出了一种确定超光滑介质板粗糙度参数和相关函数的新方法。该方法是根据正交函数系统从实验光散射指标中求出一系列的膨胀系数(CF),然后计算表面不平整高度σ和相关周期Т的标准差。该方法的显著特点是:1)在拟合实验散射曲线时,不存在理论依赖关系与不同相关函数(它们本身取决于粗糙度参数)产生的模糊性;2)避免在样品上方的整个半球测量散射指标的可能性。这种确定CF和表面粗糙度参数的方法可用于任何类型的界面,但要符合瑞利准则,瑞利准则决定了反射表面相对于入射辐射波长的粗糙度程度。因此,研究对象不仅可以是激光照射的纳米级粗糙度表面,还可以是导航卫星无线电信号遥感时的地球覆盖物。对于抛光后的石英板,得到的表面参数值与其他作者在激光干涉轮廓仪上独立测量的相似值接近。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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