Optimal mechanical parameter design using Self Resonance Cancellation control for gantry-type high precision stage

Abstract

In general, Gantry-type precision stages have low resonance modes because the structure of the stages are large and complex. These resonance modes cause a pitch motion during the translation driving. In this paper, an optimal mechanical parameter design method is analyzed and explored via a two-inertia model. In these modes, primary resonance can be suppressed by Self Resonance Cancellation (SRC) and secondary resonance can be reduced by adjusting the mechanical parameters of the stage. Simulations and experiments with an experimental precision stage are performed to show the advantages of the proposed optimization design method.