Synthesis and characterization of chemically deposited ZnO nanorods for NO2 gas sensing applications

S. Vanalakar, S. Vhanalakar, V. Patil, N. Harale, B. Kale, P. Patil, J. H. Kim
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Abstract

Zinc oxide (ZnO) nanorod arrays were deposited on to the soda-lime glass substrates by wet chemical route using zinc acetate as precursor. The structural and surface morphological properties of the ZnO nanorod arrays (ZNAs) were investigated by X-ray diffraction (XRD), and scanning electron microscopy (SEM) respectively. The XRD pattern revealed wurtzite crystal structures of ZNAs, preferentially orienting in the (002) direction. Depending on the length of nanorod, the intensity of the (002) plane was found to be varied. SEM micrographs show the vertical alignment of ZNAs perpendicular to the substrate and increase in rod length with increase in deposition time. The Gas sensing device was prepared by using ZNAs and tested for NO2 gas at different temperatures, concentrations and size of nanorods. Response increased with gas concentration as well as temperature. It was revealed that ZNAs gas sensor operating at 150 0C temperature could detect NO2 at low concentration (100ppm) with very high sensitivity (90 %).
二氧化氮气敏用化学沉积ZnO纳米棒的合成与表征
以醋酸锌为前驱体,采用湿法在钠石灰玻璃衬底上制备氧化锌纳米棒阵列。采用x射线衍射仪(XRD)和扫描电镜(SEM)研究了ZnO纳米棒阵列(ZNAs)的结构和表面形貌。XRD图谱显示ZNAs的纤锌矿晶体结构优先取向于(002)方向。根据纳米棒的长度,发现(002)平面的强度是不同的。SEM显微图显示了垂直于衬底的ZNAs的垂直排列,并且随着沉积时间的增加,棒的长度增加。利用ZNAs制备了气体传感装置,并对不同温度、浓度和纳米棒尺寸下的NO2气体进行了测试。响应随气体浓度和温度的增加而增加。结果表明,在150℃温度下工作的ZNAs气体传感器可以检测低浓度(100ppm)的NO2,灵敏度高达90%。
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