Fabrication of Large Area Flexible Dielectric Metasurafces

Abstract

We report a novel way of fabricating a large area dielectric metasurface on a flexible substrate using template stripped technique. The dielectric metasurface which consisted of high index Si nanoparticle arrays, exhibits strong narrow optical resonances in near IR (~ 830 nm) with a Q-factor as large as 100. The dielectric material platform is low loss and CMOS compatible which together could be promising for applications in the field of integrated flexible opto-electronics and adaptive photonic systems.