Electrically conductive zinc oxide (ZnO) nanostructures prepared by solgel spin-coating

2010 International Conference on Enabling Science and Nanotechnology (ESciNano) Pub Date : 2010-12-01 DOI:10.1063/1.3586953

N. Sin, M. H. Mamat, M. Rusop, Z. Zulkifli

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引用次数: 4

Abstract

The electrically conductive zinc oxide (ZnO) nanostructures prepared by sol-gel spin coating are presented. This project has been focused on electrical, optical and structural properties of Al doped ZnO thin film. The effects of Al doping concentration at 0∼5 at.% on the Al doped ZnO thin film properties have been investigated. This project involves 3 processes which are thin film preparation, deposition and characterization. The thin films were characterized using Current-Voltage (I–V) measurement and UV-Vis-NIR spectrophotometer for electrical properties and optical properties respectively. The surface morphology has been characterized using field emission scanning electron microscope (FESEM). The I-V measurement result indicated electrical properties of Al doped ZnO thin film improved with Al doping. The absorption coefficient spectra obtained from UV-Vis-NIR spectrophotometer measurement show all films have low absorbance in visible and near infrared (IR) region but have high UV absorption properties. The FESEM investigations shows that the nanoparticles size become smaller and denser as the doping concentration increase.

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溶胶旋涂法制备导电氧化锌纳米结构

介绍了溶胶-凝胶自旋镀膜法制备的导电氧化锌纳米结构。本项目主要研究Al掺杂ZnO薄膜的电学、光学和结构特性。Al掺杂浓度在0 ~ 5 at的影响。对Al掺杂ZnO薄膜性能的影响进行了研究。本项目涉及薄膜制备、沉积和表征3道工序。采用电流-电压(I-V)测量和紫外-可见-近红外分光光度计分别对薄膜的电学性能和光学性能进行了表征。利用场发射扫描电镜(FESEM)对其表面形貌进行了表征。I-V测量结果表明，Al掺杂ZnO薄膜的电学性能得到改善。紫外-可见-近红外分光光度计测量所得的吸收系数光谱表明，所有薄膜在可见光和近红外区域具有较低的吸光度，但具有较高的紫外吸收性能。FESEM研究表明，随着掺杂浓度的增加，纳米颗粒尺寸变小，密度增大。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2010 International Conference on Enabling Science and Nanotechnology (ESciNano)

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