Optimization of a SAW metal oxide semiconductor gas sensor

Proceedings. IEEE Ultrasonics Symposium Pub Date : 1989-10-03 DOI:10.1109/ULTSYM.1989.67051

R. S. Falconer, R. Lec, J. Vetelino, Z. Xu

{"title":"Optimization of a SAW metal oxide semiconductor gas sensor","authors":"R. S. Falconer, R. Lec, J. Vetelino, Z. Xu","doi":"10.1109/ULTSYM.1989.67051","DOIUrl":null,"url":null,"abstract":"A simple theoretical model is applied to the problem of a SAW (surface acoustic wave) gas sensor which operates on the principle of conductivity changes within the sensing film. The model allows the prediction of SAW sensor response for a film of known conductivity variations, and the theoretical value of SAW velocity change agrees very well with that determined by experiment. The electroacoustic attenuation was also determined to be a significant factor in designing a SAW sensor. SAW sensor response can be optimized by designing the device such that the sheet conductivity of the film is within some region dependent upon the substrate material. A WO/sub 3/ film could be designed to have a sheet conductivity within a specific range by tailoring parameters such as film thickness, doping, and heat treatment. A sensor consisting of an ST-cut SiO/sub 2/ substrate and a WO/sub 3/ film selectively sorbent to H/sub 2/S was investigated. The SAW gas sensor is configured so that the film sheet conductivity and sensor response are measured simultaneously upon exposure to H/sub 2/S. Specific operating conditions are obtained that optimized the SAW gas sensor response.<<ETX>>","PeriodicalId":89469,"journal":{"name":"Proceedings. IEEE Ultrasonics Symposium","volume":"33 1","pages":"585-590 vol.1"},"PeriodicalIF":0.0000,"publicationDate":"1989-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings. IEEE Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1989.67051","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

Abstract

A simple theoretical model is applied to the problem of a SAW (surface acoustic wave) gas sensor which operates on the principle of conductivity changes within the sensing film. The model allows the prediction of SAW sensor response for a film of known conductivity variations, and the theoretical value of SAW velocity change agrees very well with that determined by experiment. The electroacoustic attenuation was also determined to be a significant factor in designing a SAW sensor. SAW sensor response can be optimized by designing the device such that the sheet conductivity of the film is within some region dependent upon the substrate material. A WO/sub 3/ film could be designed to have a sheet conductivity within a specific range by tailoring parameters such as film thickness, doping, and heat treatment. A sensor consisting of an ST-cut SiO/sub 2/ substrate and a WO/sub 3/ film selectively sorbent to H/sub 2/S was investigated. The SAW gas sensor is configured so that the film sheet conductivity and sensor response are measured simultaneously upon exposure to H/sub 2/S. Specific operating conditions are obtained that optimized the SAW gas sensor response.<>

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SAW金属氧化物半导体气体传感器的优化设计

本文将一个简单的理论模型应用于基于传感膜内电导率变化原理工作的表面声波(SAW)气体传感器问题。该模型可以预测已知电导率变化薄膜的声表面波传感器响应，声表面波速度变化的理论值与实验结果吻合得很好。电声衰减也被确定为设计声表面波传感器的一个重要因素。SAW传感器的响应可以通过设计器件来优化，使薄膜的薄片电导率在依赖于衬底材料的某些区域内。通过调整薄膜厚度、掺杂和热处理等参数，可以设计出在特定范围内具有WO/sub - 3/薄膜的片状导电性。研究了一种由ST-cut SiO/sub - 2/衬底和WO/sub - 3/薄膜对H/sub - 2/S选择性吸附剂组成的传感器。SAW气体传感器的配置使得薄膜的电导率和传感器响应在暴露于H/sub /S时同时测量。得到了优化SAW气体传感器响应的特定工作条件

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings. IEEE Ultrasonics Symposium

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