High temperature operable low humidity (10 to 20%RH) sensor using spin coated SnO2 thin films

Pramod Kori, Vipul Dhongade, R. Aiyer
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引用次数: 1

Abstract

The paper presents Tin oxide (SnO2) based low cost, high temperature operable resistive type low humidity (10-20%RH) sensor. SnO2 thin films were prepared by spin coating 50 μl of synthesized (SnCl2) solution on alumina substrate (1.44 cm2). Material characterization of the synthesized material was carried out using UV-Visible, SEM and XRD. To get films of higher thickness they were coated from 1 to 4 layers and annealed in the furnace at an optimized temperature of 550°C for ~1 hour. Obtained SnO2 thin films were tested for change in resistance w.r.t. humidity from 10 to 20% RH at 200°C and 300°C to be used in boilers. Samples have low hysteresis (~12%) with recovery time of about ~10 sec. They have shown good repeatability (5%). The sensitivity of tested films was found to increase with respect to number of SnO2 layers. Sensitivity of 2 layered film operating at 200°C is 146 Ω/%RH and that of 4 layered film is 314 Ω/%RH, likewise at 300 °C the sensitivity of the films are 165 Ω/%RH and 323 Ω/%RH respectively.
高温可操作的低湿度(10至20%RH)传感器使用自旋涂覆SnO2薄膜
本文提出了一种基于氧化锡(SnO2)的低成本、高温可操作电阻式低湿度(10-20%RH)传感器。在1.44 cm2的氧化铝衬底上自旋涂覆50 μl的合成(SnCl2)溶液,制备了SnO2薄膜。利用uv -可见、SEM和XRD对合成材料进行了表征。为了获得更厚的薄膜,将它们从1层涂覆到4层,并在550°C的优化温度下在炉中退火约1小时。所获得的SnO2薄膜在200℃和300℃的条件下,在湿度从10%到20%之间测试了电阻的变化。样品的滞回率低(~12%),恢复时间约为~10秒,重复性好(5%)。测试膜的灵敏度随SnO2层数的增加而增加。2层膜在200°C下的灵敏度为146 Ω/%RH, 4层膜的灵敏度为314 Ω/%RH,同样在300°C下,膜的灵敏度分别为165 Ω/%RH和323 Ω/%RH。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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