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Surface, structural, electrical and mechanical modifications of pulsed laser deposited ZrN thin films by implantation of MeV carbon ions

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Pub Date : 2019-06-01 DOI:10.1016/J.NIMB.2019.04.013
K. Mahmood, S. Bashir, Faizan-ul-Haq, M. Akram, Asma Hayat, M. Rafique, A. Mahmood
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引用次数: 14
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注入MeV碳离子对脉冲激光沉积ZrN薄膜表面、结构、电学和力学的影响
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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