Femtosecond laser-assisted wet etching of Nd:Y AG crystals for photonics waveguide fabrication

Abstract

We report the effect of the pulse energy and laser beam scanning speed variation on control and intensification of the femtosecond laser-assisted wet etching of Nd:YAG crystals resulting in the fabrication of hollow tracks. Applying the optimized laser exposure parameters enables an increase of the etching rates at the initial stages